JPH0284322U - - Google Patents
Info
- Publication number
- JPH0284322U JPH0284322U JP16473288U JP16473288U JPH0284322U JP H0284322 U JPH0284322 U JP H0284322U JP 16473288 U JP16473288 U JP 16473288U JP 16473288 U JP16473288 U JP 16473288U JP H0284322 U JPH0284322 U JP H0284322U
- Authority
- JP
- Japan
- Prior art keywords
- sealed tube
- diffusion
- jig
- diffusion source
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473288U JPH0284322U (en]) | 1988-12-19 | 1988-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473288U JPH0284322U (en]) | 1988-12-19 | 1988-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0284322U true JPH0284322U (en]) | 1990-06-29 |
Family
ID=31450587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16473288U Pending JPH0284322U (en]) | 1988-12-19 | 1988-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0284322U (en]) |
-
1988
- 1988-12-19 JP JP16473288U patent/JPH0284322U/ja active Pending